![]() ![]() ![]() 239000000463 material Substances 0.000 claims description 9.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by NEC Tokin Corp filed Critical NEC Tokin Corp Priority to JP2005358627A priority Critical patent/JP2007163248A/en Publication of JP2007163248A publication Critical patent/JP2007163248A/en Status Pending legal-status Critical Current Links Original Assignee NEC Tokin Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Inventor Koichi Shuda 浩一 習田 Mitsuharu Chiba 光晴 千葉 Takeshi Mizuno 豪 水野 Akiko Oshima 亜希子 大島 Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Pending Application number JP2005358627A Other languages Japanese ( ja) Google Patents JP2007163248A - Piezoelectric vibration gyro JP2007163248A - Piezoelectric vibration gyro ![]()
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